Image: Gap k1 vs hp k1
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Gap_k1_vs_hp_k1.png (549 × 375 pixels, file size: 6 KB, MIME type: image/png)
Description: The gap between line ends is plotted as a function of line pitch, with size normalized as width = k1 * wavelength/NA. Ref.: https://www.linkedin.com/pulse/how-line-cuts-became-necessarily-separate-steps-lithography-chen
Title: Gap k1 vs hp k1
Credit: Excel drawing
Author: Guiding light
Usage Terms: Creative Commons Attribution-ShareAlike 4.0
License: CC-BY-SA-4.0
License Link: https://creativecommons.org/licenses/by-sa/4.0/
Attribution Required?: Yes
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